Publications « Center for Plasma-Material Interactions | University of Illinois at Urbana-Champaign

Publications

CPMI JOURNAL ARTICLES

2013

W. M. Lytle, D. Andruczyk, and D. N. Ruzic, “Plasma-assisted cleaning by metastable-atom neutralization”, J. Vac. Sci. Technol. B, 31, 011603 (2013).
W. Xu, D. Curreli, D. Andruczyk, T. Mui, R. Switts and D.N. Ruzic, “Heat transfer of TEMHD driven lithium flow in stainless steel trenches”, Journal of Nuclear Materials (2013).
P. Raman, A. Groll, P. Fiflis, D. Curreli, D. Andruczyk and D. N. Ruzic, “Chemical Sputtering Studies of Lithiated ATJ graphite”, Journal of Nuclear Materials (2013).

2012

C. H. Castano, M. Aghazarian, J. B. O. Caughman, II, and D. N. Ruzic, “Visual and electrical evidence supporting a two-plasma mechanism of vacuum breakdown initiation”, IEEE Transactions on Plasma Science, Vol. 40, No. 4, April 2012.
A. Dulkin, Ko, L. Wu, I. Karim, K. Leeser, and K. J. Park, L. Meng and D. N. Ruzic, “Improving the quality of barrier/seed interface by optimizing physical vapor deposition of Cu Film in hollow cathode magnetron”, J. Vac. Sci. Technol. A, 29, 041514 (2011).
S. Jung, D. Andruczyk, and D. N. Ruzic, “Laboratory investigation of vapor shielding for Lithium-coated Molybdenum in Devex”, IEEE Transaction on Plasma Science, Vol. 40, No. 3, March 2012.
Z. Ouyang, T-S Cho, and D. N. Ruzic, “Deposition of YSZ thin films by atmospheric plasma-assisted pulsed laser ablation”, IEEE Transaction on Plasma Science, Vol. 40, No. 11, November 2012.
J. Sporre and D. N. Ruzic, “Debris transport analysis at the intermediate focus of an extreme ultraviolet light source”, Journal of Micro/Nanolith. MEMS MOEMS 11(2), 021117 (Apr–Jun 2012).
Y. Wu, J. Hong, Z. Ouyang, T-S. Cho, and D. N. Ruzic, “Electrical and optical characteristics of cylindrical non-thermal atmospheric-pressure dielectric barrier discharge plasma sources”, Surface and Coatings Technology, 2012.

2011

A. Dulkin, E. Ko, L. Wu, I. Karim, K. Leeser, K. J. Park, L. Meng, and D. N. Ruzic, “Improving the quality of barrier/seed interface by optimizing physical vapor deposition of Cu film on hollow cathode magnetron,” J. Vac. Sci. Technol. A 29(4), 041514 (2011).

D. N. Ruzic and V. Surla, “High-energy density beams and plasmas for micro- and nano-texturing of surfaces by rapid melting and solidification”, J. Phys. D: Appl. Phys. 44, 174026, (2011).
V. Surla, P. Raman, D. Burns, M.J. Neumann, D.N. Ruzic, “Physical and chemical erosion studies of lithiated ATJ graphite,” Journal of Nuclear Materials (2011).
D. N. Ruzic, W. Xu, D. Andruczyk and M. A Jaworski, “Lithium-Metal Infused Trenches (LiMIT) for Heat Removal in Fusion Devices”, Nuc. Fusion52 (2011) 102002 (4pp)
V. Surla, M. Tung, W. Xu, D. Andruczyk, M. Neumann, D. N. Ruzic and D. Mansfield, “Seebeck Coefficient Measurements of Lithium Isotopes“, J. Nuc. Matter 415 (2011) 18-22.
S. Jung, V, Surla, T, K. Gray, D. Andruczyk and D. N. Ruzic, “Characterization of a Theta-Pinch Plasma Using Tripple Probe Diagnostics”, J. Nuc. Matter, Published on line, xxx (2011) xxx-xxx.
Z. Ouyang, L. Meng, P. Raman, T. S. Cho and D. N. Ruzic, “Laser-assisted plasma coating atatmospheric pressure: production ofyttria-stabilized zirconia thermal barriers“, J. Phys. D: Appl. Phys. 44 (2011) 265202
L. Meng, A. N. Cloud, S. Jung and D. N. Ruzic, “Study of Plasma Dynamics in a Modulated Pulsed Power Magnetron Discharge Using a Time-Resolved Langmuir Probe“, Journal of Vacuum Science & Technology A 29(1), Jan/Feb 2011.

2010

C. Y. Hwang, S. Jung, Y. S. Hwang and B. C. Cho, “Lethal Effects of Pulsed High-Voltage Discharge on Marine Plankton and Escherichia coli“, Water Air & Soil Pollution (2010) 213:161–16
L. Wu, E. Ko, A. Dulkin, K. J. Park, S. Fields, K. Leeser, L. Meng and D. N. Ruzic, “ Flux and energy analysis of species in hollow cathode magnetron ionized physical vapor deposition of copper “, Review of Scientific Instruments 81, 123502 (2010)
L. Meng, R. Raju, R. Flauta, H. Shin, D.N. Ruzic and D. B. Hayden “In situ Plasma Diagnostics Study of a Commercial High-Power Hollow Cathode Magnetron Deposition Tool”, Journal of Vacuum Science and Technology A, 28, 112, (2010).
M. A. Jaworski, T. K. Gray, M. Antonelli, J. J. Kim, C.Y. Lau, M. B. Lee, M. J. Neumann, W. Xu, and D. N. Ruzic, “Thermoelectric Magnetohydrodynamic Stirring of Liquid Metals” Physics Review Letters, 104, 094503 (2010).
R. Raju, L. Meng, R. Flauta, H. Shin, M. J. Neumann, T. A. Dockstader and D. N. Ruzic, “Development and Characterization of a Secondary RF Plasma-Assisted Closed-Field Dual Magnetron Sputtering System for Optical Coatings on Large-Area Substrates”, Plasma Sources and Technology, 19, 025011 (2010).
V. Surla, M. A. Jaworski, T. K. Gray, K. Ibano, W. Xu, M. J. Neumann, and D. N. Ruzic, “Lithium research as a Plasma Facing Cmponent Material at the University of Illinois” Thin Solid Films, Vol. 518, No. 22, pp. 6663-6666 (2010).
C. R. Struck, R. Flauta, M.J. Neumann, K.N. Kim, R. Raju, R. L. Bristol, D.N. Ruzic, “Grazing Incidence Broad Ion Beams for Reducing Line-Edge Roughness,” Journal of Micromechanics and Microengineering, Vol. 20, No. 7 (2010).
K. Ibano, D. Ruzic, and V. Surla, “Sputtering and thermal evaporation studies of lithiated ATJ graphite,” IEEE Transactions on Plasma Science, Vol. 38, No. 3 part 1, p 341-345 (2010).
D. N. Ruzic and A. J. Paul, “Guest editorial special issue on symposium on fusion engineering,” IEEE Transactions on Plasma Science, Vol. 38, No. 3 Part 1, p 222-223 (2010).

2009

M. Jarworski, N.B. Morley, and D. N. Ruzic, “Thermocapillary and Thermoelectric Effects in Liquid Lithium Plasma Facing Components”, Journal of Nuclear Materials, 390–391, pp. 1055-1058 (2009).
H. Shin, J. Sporre, R. Raju, D. N. Ruzic, “Reflectivity degradation of grazing-incident EUV mirrors by EUV exposure and carbon contamination”, Microelectronic Engineering, v 86, n 1, p 99-105 (2009).
H. Qiu, S. N. Srivastava, K. C. Thompson, M. J. Neumann, D. N. Ruzic “The Effectiveness of Mo-Au Gibbsian Segregating (GS) Alloys and The Surface Removal Effect on the GS Performance for EUV Collector Optics”, Optics Engineering, 48, 056501 (2009).
J. Sporre, C. H. Castano, R. Raju, and D. N. Ruzic, “Ionic Debris Measurement of Three Extreme Ultraviolet Sources,” Journal of Applied Physics, 106, 4 (2009).
M. Racic, K. Ibano, R. Raju and D. N. Ruzic, “Physical Erosion Studies of Plain and Lithiated Graphite”, Journal of Nuclear Materials, 390-391, pp. 1043-1047 (2009).

2008

H. Qiu, S. N. Srivastava, K. C. Thompson, M. J. Neumann, D. N. Ruzic “Temperature Dependence of Mo-Au Gibbsian Segregating Alloys”, Journal of Micro/Nanolithography Mems & Moems, 7, 033004 (2008).
M. A. Jaworski, C. Y. Laua, D. L. Urbansky, M. B. Malfa, T. K. Gray, M.J. Neumann, and D. N. Ruzic “Observations of liquid lithium uptake in a porous molybdenum foam” J. of Nuclear Materials. 378, pp. 105-109, May (2008).
H. Qiu, S. N. Srivastava, K. C. Thompson, M. J. Neumann, and D. N. Ruzic, “Time exposure performance of Mo-Au Gibbsian segregating alloys for extreme ultraviolet collector optics,” Appl. Opt. 47, 2443-2451 (2008).
H. Shin, S. N. Srivastava, D. N. Ruzic, “Tin removal from extreme ultraviolet collector optics by inductively coupled plasma reactive ion etching” J.Vac. Sci. Tech. May 2008, vol 26(3), pp. 389-398accepted 2008.
C. Castano, M. Aghazarian, D.N. Ruzic,“Preliminary evidence of field induced rhenium etching by XEF2 at high vacuum” J. Applied Physics,103, 044901-4, 2008.
O Morris, P Hayden, P Dunne, F O’Reilly, G O’Sullivan, E Sokell1, E L Antonsen, S N Srivastava, K C Thompson and D N Ruzic, “Determination of charge state, energy and angular distributions of tin ions emitted from laser produced plasma based EUV sources” J. of Physics, 2008.

2007

Neumann, M. J., DeFrees, R. A., Qiu, H., Ruzic, D. N., Khodykin, O., Ershov, A., and Bristol, R. L, “ Plasma cleaning of lithium off of collector optics material for use in extreme ultraviolet lithography applications”, Journal of Micro/nanolithography Mems & Moems, 6:2, 23005 (Apr.-Jun. 2007).
J.P Allain, M.D. Coventry, D.N. Ruzic, “Collisional and thermal effects on liquid lithium sputtering”, Phys. Rev. B, 76 (2007) 205434-1 to 12.
S. N. Srivastava, K.C. Thompson, E. L. Antonsen, H. Qiu, J.B Spencer, D. Papke, D. N. Ruzic, “Lifetime measurements on collector optics from Xe and Sn extreme ultraviolet sources”, J. of Applied Physics, 102, 023301, (2007).
D. N. Ruzic, K.C. Thompson, B.E. Jurczyk, E.L. Antonsen, S.N. Srivastava, J.B. Spencer, “Reduction of Ion Energies from a Multicomponent Z-Pinch Plasma”, IEEE Tran. On Plasma Sci. 35, 606-613 (2007) 606-613.
T.K. Gray, M.A. Jaworski, D.N. Ruzic, “Target heat loading due to fast, transient heat pulses produced from a conical theta-pinch as a prototype for benchmarking simulations of transient heat loads”, J. Nuc. Mater. 363-365 (2007) 1032-1036
D. A. Alman, H. Qiu, T. Spila, K. Thompson, E. Antonsen, B. Jurczyk, D. N. Ruzic, “Characterization of Collector Optic Material Samples Exposed to a DPP EUV Light Source”, J. Microlithography, Microfabrication, and Microsystems, 6(1), 2007.

2006

Huatan Qiu, Keith C. Thompson, S.N. Srivastava, Erik L. Antonsen, Darren A. Alman, Brian E. Jurczyk, D.N. Ruzic, “Optical exposure characterization and comparisons for discharge produced plasma Sn extreme ultraviolet system”, J. Microlithography, Microfabrication, and Microsystems, 5(3), 033007(1-11), 2006
Huatan Qiu, Darren A. Alman, Keith C. Thompson, Joshua B. Spencer, Erik L. Antonsen, Brian E. Jurczyk, D. N. Ruzic, Tim P. Spila, “Characterization of collector optic material samples before and after exposure in laser produced plasma and discharge produced plasma EUV sources“, J. Microlithography, Microfabrication, and Microsystems, 5(3), 033006(1-11), 2006.
M. A. Jaworski, B. E. Jurczyk, Erik L. Antonsen, D. N. Ruzic, “Direct current magnetic insulation of an immersed RF antenna”, Plasma Source Science and Technology 15, 474-478 (2006).
Erik L. Antonsen, Keith C. Thompson, Matthew R. Hendricks, Darren A. Alman, Brian E. Jurczyk, D. N. Ruzic, “Ion Debris Characterization from a Z-Pinch Extreme Ultraviolet Light Source”, J. Appl. Phys., 99 063301 (2006).
Ning Li, P.W. Brenner, D.N. Ruzic, “An Integrated model for the Chemically Enhanced Physical Vapor Deposition (CEPVD) of tantalum nitride-based FILMS”, J. Vac. Sci. Technol., B, 24(3), (2006) 1071-1087.
Nieto, M., D.N. Ruzic, W. Olczak, R. Stubbers, “Measurement of Implanted Helium Particle Transport by a Flowing Liquid Lithium Film”, J. Nucl. Mater., 350 (2006) 101-112.
K.C. Thompson, E.L Antonsen, M.R. Hendricks, B.E. Jurczyk, M. Williams, D.N. Ruzic, “Experimental test chamber design for optics exposure testing and debris characterization of a xenon discharge produced plasma source for extreme ultraviolet lithography”, Microelectronics Engineering, 83 (2006) 476-484.

2005

Allain, J.P., D. N. Ruzic, M.D. Coventry, D. A. Alman, M.N. Nieto, “A Model for Ion-Bombardment Induced Erosion Enhancement with Target Temperature”, Nucl. Instrum. and Meth. B, 239 (2005) 347-355.
Brooks, J.N., J.P. Allain, R. Bastasz, R. Doerner, A. Hassanein, R. Kaita, S. Luckhardt, R. Maingi, R. Majeski, N. Morely, N. Narula, T. Rognlien, D. Rudakov, D. Ruzic, R, Stubbers, M. Ulrickson, C.P.C. Wong, A. Ying, “Overview of the ALPS Program”, Fusion Science Technology, 47 (2005) 669-678.
M.D. Coventry and D.N. Ruzic, “Incident-mass dependence of temperature-enhanced ion-induced sputtering in liquid metals”, Journal of Nuclear Materials 337-339 (2005) 1015-1018.
Qiu, Hua-Tan, D.N. Ruzic, “Molecular dynamics modeling of deuterium in liquid lithium surfaces”, Journal of Nuclear Materials 337-339 (2005) 1029-1032.
Stubbers, R., W. Olczak, M. Nieto, D. N. Ruzic, “Measurement of hydrogen absorption in flowing liquid lithium in the flowing lithium retention experiment (FLIRE)”, Journal of Nuclear Materials 337-339 (2005) 1033-1037.
Brooks, J.N., J.P. Allain, D.A. Alman and D.N. Ruzic, “Erosion, transport, and tritium codeposition issues of a beryllium wall tokamak”, Fusion Engineering and Design 72 (2005) 363-375.
Vargas-López, E., B E Jurczyk, M A Jaworski, M J Neumann, D N Ruzic, “Origins of debris and mitigation through a secondary RF plasma system for discharge-produced EUV sources”, Microelectronics Engineering 77 (2005) 95-102.
Jurczyk, B.E., E. Vargas-Lopez, M. N. Neumann, D. N. Ruzic, “Illinois Debris-mitigation EUV Applications Laboratory (IDEAL)”, Microelectronics Engineering 77 (2005) 103-109.

2004

Allain, J.P., M. Nieto, M.D. Coventry, R. Stubbers, D.N. Ruzic, “Studies of liquid-metal erosion and free surface flowing liquid lithium retention of helium at the University of Illinois”, Fusion Engineering and Design 72 (2004) 93-110.
Li, N., D.N. Ruzic, R.A. Powell, “Chemically Enhanced Physical Vapor Deposition (CEPVD) of TaN diffusion barrier layers for ULSI devices”, J. Vac. Sci. Technol. B 22(6), 2734-2742, Nov/Dec 2004.
Coventry, M.D., J.P. Allain, D.N. Ruzic, “Temperature Dependance of Liquid Sn Sputtering by low energy He and D bombardment”, Journal of Nuclear Materials 335, 115-120 (2004).
Alman, D.A, D.N. Ruzic, “Molecular Dynamics Simulation of Hydrocarbon Reflection and Dissociation Coefficients from Fusion-Relevant Carbon Surfaces”, Physica Scripta, T111, 145-151 (2004).

2003

Nieto M. Ruzic DN. Allain JP. Experimental measurements of helium retention in flowing liquid lithium. Fusion Science & Technology, 44:1, 232-236 (2003).
Alman, D.A., D.N. Ruzic, J.N. Brooks, “Molecular Dynamics Calculation of Carbon/Hydrocarbon Reflection Coefficients on a Graphite Surface Employing Distrubuted Computing”, J. Nucl. Mater. 313-316, 182-186 (2003).
Brooks, J.N., A. Kirschner, D.G. Whyte, D.N. Ruzic, D.A. Alman, “Advances in the Modeling of Chemical Erosion/Redeposition of Carbon Divertors and Application to the JET Tritium Codeposition Problem”, J. Nucl. Mater., 313-316 424-428 (2003).
M. Nieto, D. N. Ruzic, J.P. Allain, M.D. Coventry and E. Vargas-Lopez, “Helium Retention and Diffusivity in Flowing Liquid Lithium”, J. Nucl. Mater. 313-316, 646-650 (2003).
Allain, J.P., M.D. Coventry, D.N. Ruzic, “Temperature-Dependence of Liquid Lithium Sputtering”, J. Nucl. Mater. 313-316, 641-645 (2003).
Coventry, M.D., J.P. Allain, D.N. Ruzic, “D+, H+, and He+ Sputtering of Solid and Liquid Phase Tin”, J. Nucl. Mater., 313-316, 636-640 (2003).

2002

Allain, J.P., M. Nieto, M.D. Coventry, M.J. Neumann, E. Vargas-Lopes, D.N. Ruzic, “FLIRE—Flowing Liquid Surface Retention Experiment, Design and Testing”, Fusion Engineering and Design, 61-62, 245-250 (2002).
Allain, J.P., D.N. Ruzic. “Deuterium Treatment Effects on Lithium and Tin-Lithium Sputtering in Solid and Liquid Phase”, Hydrogen and Heilium Recycling at Plasma Facing Materials, Ed. Ahmed Hassanein. Netherlands: Kluwer Academic Publishers, 2002. pg. 73-82.
Li, Ning, J.P. Allain, D.N. Ruzic, “Enhancement of Aluminum Oxide Physical Vapor Deposition with a Secondary Plasma”, Surf. and Coatings Technol., 149, 161-170 (2002).
Juliano, D.R., D.N. Ruzic, M.M.C. Allain, D.B. Hayden, “Influences on Ionization Fraction in an Inductively Coupled Ionized Physical Vapor Deposition Device Plasma”, J. Appl. Phys. 91, 605-12 (2002).
Allain, J.P., D.N. Ruzic, “Measurements and Modeling of Solid Phase Lithium Sputtering”, Nuclear Fusion, 42, 202-210 (2002).

2001

Ranjan, R., J.P. Allain, M.R. Hendricks, D.N. Ruzic, “Absolute Sputtering Yield of Ti/TiN by Ar+/N+ at 400 – 700 eV”, J. Vac. Sci. Technol., A, 19, 1004-1007 (2001).
Allain, J. P., D.N. Ruzic, M.R. Hendricks, “Measurements and Modeling of D, H, and Li Sputtering of Liquid Lithium”, J. Nucl. Materials, 290-293, 1809-184 (2001).
Allain, J. P., D.N. Ruzic, M.R. Hendricks, “D, He and Li Sputtering of Liquid Eutectic Sn-Li”, J. Nucl. Materials, 290-293, 33-37 (2001).
Brooks, J.N., T. Rognlien, D.N. Ruzic, J.P. Allain, “Erosion/Redeposition Analysis of Lithium-Based Liquid Surface Divertors”, J. Nucl. Materials, 290-293, 185-190 (2001).

2000

Mattas, R.F, J.P. Allain, R. Bastasz, J.N. Brooks, T. Evans, A. Hassanein, S. Luckhardt, K. McCarthy, P. Mioduszewski, R. Maingi, E. Mogahed, R. Moir, S. Molokov, N. Morley, R. Nygren, T. Ronglien, C. Reed, D.N. Ruzic, I. Svitoslavsky, D. Sze, M. Tillack, M. Ulrichson, P.M. Wade, R. Wooley and C. Wong, “ALPS-Advanced Limiter-Divertor Plasma-Facing Systems”, Fusion Energy and Design, 49-50, 127-134 (2000).
Allain, M.M C. D.B. Hayden, D.R. Juliano, D.N. Ruzic, “Characterization of magnetron-sputtered partially ionized deposition as a function of metal and gas species”, J. Vac. Sci. Technol., A, 13, 797-801 (2000).
Alman, D.A. and D.N. Ruzic, “A Hydrocarbon Reaction Model for Low Temperature Hydrogen Plasmas and an Application to the Joint European Tours”, Physics of Plasmas, 7, 1421-1432 (2000).
Wang, Z., S.A. Cohen, D.N. Ruzic and M.J. Goeckner, “Nitrogen Atom Energy Distributions in a Hollow-Cathode Planar Sputtering Magnetron”, Phys Rev E., 61, 1904-1911 (2000).

1999

Smith, P.C. and D.N. Ruzic, “Low-energy Ar+ Ion Induced Angularly Resolved AI(100) and AI(110) Sputtering Measurements”, J. Vac. Sci. and Tech., A17, 3443-3448, (1999).
Hayden, D.B., D.R. Juliano, M.N. Neumann, M.M. Allain, D.N. Ruzic, “Helicon Plasma Source for Ionized Physical Vapor Deposition”, Surf. Coating Tech., 121, 401-404 (1999).
Ruzic, D. N., M.C. Allain, and R.V. Budny, “The Effect of Lithium Wall Conditioning in TFTR on Plasma-Surface Interactions”, J. Nucl. Mater., 266-269, 1303-1308 (1999).
Brooks, J.N., D. Alman, G. Federici, D.N. Ruzic, and D.G.Whyte, “Erosion Redeposition Analysis: Status of Modeling and Code Validation for Semi-Detached Tokamak Edge Plasmas”, J. Nuclear Materials, 266-269, 58-66 (1999).

1998

Smith, P.C. and D.N. Ruzic, “Low-Energy (10-700eV) Angularly Resolved Sputtering Yields for D+ on Be”, Nuclear Fusion, 38(5), 673-680 (1998).
Hayden, D.B., D.R. Juliano, K.M. Green, D.N. Ruzic, C.A. Weiss, K.A. Ashtiani, T.J. Licata, “Characterization of Magnetron-Sputtering with Partially Ionized Aluminum Deposition,” J. Vac. Sci. Tech., A, 16(2), 624-627 (1998).
Haynes, L.A., J.P. Kelly, D.N. Ruzic, “Neutral Atom Modeling of the TFTR First Wall, Pump Ducts, and Neutral Beams,” Fusion Technology, 33, 74-83 (1998).

1997

Green, K.M., D.B. Hayden, D.R. Juliano, and D.N. Ruzic, “Determination of Flux Ionization Fraction Using a Quartz Crystal Microbalance and a Gridded Energy Analyzer in an Ionized Magnetron Sputtering System”, Review of Scientific Instruments, 68, 4555-4560 (1997).
Brooks J.N., D.N. Ruzic, D.B. Hayden, “Sputtering Erosion of Beryllium Coated Plasma Facing Components — General Considerations and Analysis for ITER Detached Plasma Regime”, Fusion Engineering and Design, 37, 332-337 (1997).
Ruzic, D.N., Preston C. Smith, R.B. Turkot Jr., “Measurement and Modeling of the Angular-Resolved Sputtering Yield of D-Soaked Be by 100, 300, 500 and 700 eV D+”, J. Nuclear Materials, 241-243, 1170-1174 (1997).
Brooks, J.N., R. Causey, G Federici, D.N. Ruzic, “Assessment of Erosion and Surface Tritium Inventory Issues for the ITER Divertor”, J. Nuclear Materials, 241-243, 294-298 (1997).
D.N. Ruzic and D.B. Hayden, “Momentum and Energy Transfer via Neutral Atoms and Molecules in an International Thermonuclear Experimental Reator Low-Pressure (10-mTorr) Gas Target Divertor,” Fusion Technol., 31, 123-127 (1997).
Hayden, D.B. and D.N. Ruzic, “Simulation of Neutral Atoms and Molecules in an International Thermonuclear Experimental Reator High-Pressure (1Torr) Ultra-High Recycling Divertor,” Fusion Technol., 31, 128-134 (1997).

1996

Rossnagel, S.M., C. Nichols, S. Hamaguchi, D.N. Ruzic, R. Turkot, “Thin, High Atomic Weight Refractory Film Deposition for Diffusion Barrier, Adhesion Layer, and Seed Layer Applications,” J. Vac. Sci. Technol., B, 14 (3), 1819-1827 (1996).
Stotler, D.P., C.H. Skinner, R.U. Budny, A.T. Ramsey, D.N. Ruzic, R.B. Turkot Jr., “Modeling of Neutral Hydrogen Velocities in Tokamak Fusion Test Reactor,” Phys. of Plasmas, 3(11), 4084-4094 (1996).
Kushner, M.J., W.Z. Collison, D.N. Ruzic, “Electron-Beam Controlled Radio Frequency Discharges for Plasma Processing,” J. Vac. Sci. Technol., 14(4), 2094-2101 (1996).
Ruzic, D.N., “Hydrogen Collision Dynamics on a Rough Nickel Surface,” Plasma Science, 24, 81-82 (1996).
Juliano, D.R., D.N. Ruzic, D. Hill, K.A. Werley, “Sensitivity of Neutral Throughput to Geometry and Plasma Position in the Tokamak Physics Experiment Divertor Region,” Fusion Technology, 29, 269-276 (1996).

1995

Cheng, P.F., S.M. Rossnagel, D.N. Ruzic, “Directional Deposition of Cu into Semiconductor Trench Structures using Ionized Magnetron Sputtering“, J. Vac. Sci. Technol., B, 13, 203-208 (1995).
Ruzic, D.N., “Neutral Atom and Molecular Transport in a Gaseous Divertor,” J. Nuclear Materials, 220-222, 1091-1096 (1995).
Brooks, J. N., D.N. Ruzic, D.B. Hayden, and R.B. Turkot Jr., “Surface Erosion Issues and Analysis for Dissipative Divertors,” J. Nuclear Materials, 222, 269-273 (1995).
Hill, D.N., B. Braams, J.N. Brooks, D.N. Ruzic, M. Ulrickson, K.A. Werley, R. Campbell, R. Goldston, T. Kaiser, G.H. Neilson, P. Mioduszewski, M.E. Rensink, T.D. Rognlien, “Divertor Design for the Tokamak Physics Experiment,” J. of Nuclear Materials, 222, 698-702 (1995).

1994

Driemeyer, D., D. Bowers, J. Davis, D. Kubik, H. Mantz, M. McSmith, T. Rigney, C. Baxi, L. Sevier, M. Carelli, L. Green, D. Ruzic, D. Hayden, M. Gabler, J. Yuen, “ÏTER Divertor Research and Development Activities,” Fusion Technology, 3, 603-610 (1994).
Smith, P. C., B. Hu, and D. N. Ruzic, “Low Energy Ion-Induced Electron Emission From Gas-Covered Surfaces,” J. Vac. Sci. Tech., A, 12, 2692-2700 (1994).
Hendricks, M. B., P. C. Smith, D. N. Ruzic, A. Leybovich, J. E. Poole, “Effects of Ion-Induced Electron Emission on Magnetron Plasma Instabilities,” J. Vac. Sci. Technol., A, 12, 1408-1416 (1994).
Leybovich A., T. Kuniya, P. C. Smith, M. B. Hendricks, and D. N. Ruzic, “Effects of Target Polycrystalline Structure and Surface Gas Coverage on Magnetron I-V Characteristics,” J. Vac. Sci. Technol., A, 12, 1618-1622 (1994).

1993

Schmidt, J.A., K.I. Thomassen, D.N. Ruzic, plus many other authors too numerous to list, “The Design of the Tokamak Physics Experiment (TPX),” J. Fusion Technology, 12,3, 221-258 (1993).
Shaheen, M. A. and D. N. Ruzic, “Evolution of Atomic-Scale Surface Structures During Ion Bombardment: A Fractal Simulation,” Vac. Sci. Technol., A, 11 , (1993).
Ruzic, D. N., “The Effects of Elastic Scattering in Neutral Atom Transport,” Physics of Fluids B, 5, 3140-3147 (1993).
Schatz, K. D. and D. N. Ruzic, “An Electron-Beam Plasma Source and Geometry for Plasma Processing,” Plasma Sources Sci. Technol., 1, 1-6 (1993).
Turkot, R. B. Jr. and D. N. Ruzic, “Time-and Space-Resolved Radio-Frequency Plasma Electron Energy Distributions from a Displacement-Current-Based Electric Probe Diagnostic,” J. Appl. Phys., 73, 1-7 (1993).

1992

Ruzic, D. N., D. R. Juliano, “Effect of Boundary Conditions on the Neutral Gas Temperatures and Densities in the ITER Divertor and Pump Duct,” J. Nucl. Mater., 196-198, 194-198 (1992).
Snipes, J. A., E. S. Marmar, J. L. Terry, M. G. Bell, R. V. Budny, K. W. Hill, D. L. Jassby, D. K. Mansfield, D. M. Meade, H. K. Park, J. D. Strachan, B. C. Stratton, E. J. Synakowski, G. Taylor, D. N. Ruzic, and M. Shaheen, “Wall Conditioning with Impurity Pellet Injection on TFTR,” J. Nucl. Mater., 196-198, 686-691 (1992).
Myers, A. M., D. N. Ruzic, J. R. Doyle, “Monte Carlo Simulations of Sputter Atom Transport in Low-Pressure Sputtering; The effects of Interaction Potential, Sputter Distribution and System Geometry,” J. Appl. Phys., 72, 3064-3071 (1992).

1991

Rossnagel, S. M., K. Schatz, S. J. Whitehair, C. R. Guarnieri, D. N. Ruzic, and J. J. Cuomo, “The Effects of Substrate Potentials on Electron Cyclotron Resonance Plasmas,” J. Vac. Sci. Technol., A, 9, 702-706 (1991).
Nguyen, P. L., R. B. Turkot Jr., and D. N. Ruzic, “Energy Distribution Measurements in Radio Frequency Plasma Discharges Using a Cubical Analyzer,” J. Vac. Sci. Technol., A, 9, 682-687 (1991).
Myers, A. M., J. R. Doyle, J. R. Abelson, and D. N. Ruzic, “Monte Carlo Simulations of Magnetron Sputtering Particle Transport,” J. Vac. Sci. Technol., A, 9, 614-618 (1991).

1990

Bastasz, R., S. J. Kilpatrick and D. N. Ruzic, “Charge-Exchange Neutral Hydrogen Measurements in TFTR Using Pd-Mos Microsensors,” J. Nucl. Mater., 176-177, 1038-1043 (1990).
Zonca, F., S. A. Cohen, J. Cuthbertson, J. Timberlake, and D. N. Ruzic, “Measurements of Plasma Flows in a Divertor Simulation,” J. Nucl. Mater., 176-177, 746-749 (1990).
Brooks, J. N., D. N. Ruzic, “Modeling and Analysis of Surface Roughness Effects on Sputtering, Reflection, and Sputtered Particle Transport,” J. Nucl. Mater., 176-177, 278-282 (1990).
Ruzic, D. N., K. A. Werley, S. A. Cohen, “Neutral Gas Temperature and Densities in Divertor Region and Pump Duct of ITER,” J. Nucl. Mater., 176-177, 926-934 (1990).
Cain, B. L., D. N. Ruzic, “A Small Electron Cyclotron Resonant Plasma-Based Neutral-Flux Ionizer,” Rev. Sci. Instrum., 61, 3473-3478, (1990).
Caughman, J. B. O., D. N. Ruzic, D. J. Hoffman, R. A. Langley, and M. B. Lewis, “Ion Energy Measurements at the Surface of an Ion Cyclotron Range of Frequencies Antenna Faraday Shield,” J. Vac. Sci. Technol., A, 8, 4011-4016 (1990).
Ruzic, D. N., J. L. Wilson, “Time-Resolved Electric Probe Techniques in Radio Frequency Plasmas,” J. Vac. Sci. Technol., A, 8, 3746-3751 (1990).
Myers, A. M., D. N. Ruzic, R. C. Powell, J. E. Greene, and J. R. Abelson, “Energy and Mass Resolved Detection of Neutral and Ion Species using Modulated-Pole-Bias Quadrupole Mass Spectroscopy,” J. Vac. Sci. Technol., A, 8, 1668-1672 (1990).
Ruzic, D. N., “The Effects of Surface Roughness Characterized by Fractal Geometry on Sputtering,” Nucl. Instr. Meth., B, 47, 118-125 (1990).

1989

Ruzic, D. N., K. D. Schatz, and P. L. Long, “A Novel Apparatus to Investigate the Possibility of Plasma-Assisted Cold Fusion,” Fusion Technology, 16, 251-253 (1989).
Wilson, J. L., J. B. O. Caughman, P. L. Nguyen, and D. N. Ruzic, “Measurements of Time Varying Plasma Potential, and Electron Temperature and Density in a 13.6 MHz RF Discharge,” J. Vac. Sci. Technol., A, 7, 972-976 (1989).
Caughman, J. B. O., D. N. Ruzic, and D. H. Hoffman, “Floating Potential Measurements in the Near Field of an ICRH Antenna,” J. Vac. Sci. Technol., A, 7, 1092-1098 (1989).
Ruzic, D. N. and H. K. Chiu, “Modeling of Particle-Surface Reflections Including Surface Roughness Characterized by Fractal Geometry,” J. Nucl. Mater., 162-164, 904-909 (1989).
Bastasz, R. B. L. Cain, T. E. Cayton, R. C. Huges, and D. N. Ruzic, “Plasma-Edge Diagnostics Based on Pd-Mos Diodes,” J. Nucl. Mater., 162-164, 587-592 (1989).

1988

Cain, B. L., D. N. Ruzic, and R. Bastasz, “Production of Focused, Low-Energy, Hydrogen-Ion Using a Colutron Ion Source,” J. Vac. Sci. Technol., B 6, 485-490 (1988).

1987

Mandrekas, J., C. E. Singer, and D. N. Ruzic, “Effects of Plasma-Wall Sheath on Transport,” J. Vac. Sci. Technol., A 5, 2315-2318 (1987).
Caughman, J. B. O., D. N. Ruzic, and D. H. Hoffman, “The Effects of Radio Frequency Waves on the Sputtering of Ion Cyclotron Resonance Heating Antenna Faraday Shields,” J. Vac. Sci. Technol., A 5, 2301-2304 (1987).
Ruzic, D. N. and G. A. Gerdin, “An In-Situ Technique to Measure Erosion and Deposition in Fusion Devices,” J. Nucl. Mater., 145-147, 453-457 (1987).
Ruzic, D. N., D. Heifetz, and S. Cohen, “The Density Dependence of Neutral Hydrogen Density and Neutral Hydrogen Emission from PLT,” J. Nucl. Mater., 145-147, 527-533 (1987).

1986

Ruzic, D. N., G. A. Gerdin, and C. M. Loxton, “Comparison of Glow Discharge Cleaning and Ion-Impact Desorption of Stainless Steel,” J. Vac. Sci. Technol., A 4, 3, 1232-1235 (1986).

1985

Ruzic, D. N. and S. Cohen, “Total Scattering Cross-Sections and Interatomic Potentials for Neutral Hydrogen and Helium, and Some Noble Gasses,” J. Chem. Phys., 83, 11, 5527-5530 (1985). (>This publication is derived from Prof. Ruzic’s Ph.D. Thesis).

1984

Cohen, S., S. Bernabei, R. Budny, T. K. Chu, P. Colestock, E. Hinnov, W. Hooke, J. Hosea, D. Hwang, F. Jobes, D. Manos, R. Motley, D. N. Ruzic, J. Stevens, B. Stratton, S. Suckewer, S. Von Goeler, and R. Wilson, “Plasma-Materials Interactions During RF Experiments in Tokamaks,” J. Nucl. Mater., 128-129, 280-291 (1984).

1983

Cohen, S., D. N. Ruzic, D. E. Voss, R. Budny, P. Colestock, D. Heifetz, J. Hosea, D. Hwang, D. Manos, and J. Wilson, “Measurements of Low-Energy Neutral Hydrogen Efflux During ICRF Heating,” Nucl. Fusion, 24, 11, 1490-1496 (1984).
Cohen, S., D. N. Ruzic, D. E. Voss, “Measurements of Low-Energy Neutral Outflux During ICRF Heating,” Proc. of IX Intl. Vacuum Congress, Madrid, Spain, 455-468 (1983).
Budny, R., A. Cavallo, S.Cohen, C. Daughney, P. Efthimion, R. Fonck, R. Hulse, D. Hwang, D. Manos, A.-L. Pequet, D. N. Ruzic, J. Schivell, B. Smith, and R. Yelle, “Perturbation of Tokamak Edge Plasma by Laser Blow-Off Impurity Injections,” J. Vac. Sci. Technol., A 1, 837-840 (1983).
Ruzic, D. N., S. Cohen, B. Denne, and J. Schivell, “Low-Energy Neutral Spectroscopy During Pulsed Discharge Cleaning in PLT,” J. Vac. Sci. Technol., A 1, 818-821 (1983).

1982

Ruzic, D. N., R. Moore, D. Manos, and S. Cohen, “Secondary Electron Yields of Carbon-Coated and Polished Stainless Steel,” J. Vac. Sci. Technol., 20, 1313-1316 (1982).
Manos, D., D. N. Ruzic, R. Moore, and S. Cohen, “Laboratory Study of the PDX/PLT Laser Blow-Off Trace Element Injectors,” J. Vac. Sci. Technol., 20, 1230-1233 (1982).

Featured News
- CPMI gains affiliate faculty member.
  February 22, 2013
  CPMI is pleased to welcome Dr. Logan Liu from the Electrical Engineering department. Dr. Ruzic, CPMI’s Director, and Dr. Liu will be submitting a joint SRI proposal.
- 26th Annual Ruzic Chili Cookoff
  February 17, 2013
  On February 16th, CPMI Director Dr. David Ruzic held his 26th annual Chili Cookoff. Over 95 people were in attendance and over 33 different chilis were served. A good time was had by all.
- Princeton Plasma Physics Lab comes to Champaign.
  February 16, 2013
  Daniel Andruczyk, one of CPMI’s Research Engineers employed at Princeton’s Plasma Physics Lab returned to Champaign this week. He brought along a fast framing camera, which was extremely useful in additional experiments. We look forward to future visits from Dan.
Read More »

Publications

CPMI JOURNAL ARTICLES

2013

W. M. Lytle, D. Andruczyk, and D. N. Ruzic, “Plasma-assisted cleaning by metastable-atom neutralization”, J. Vac. Sci. Technol. B, 31, 011603 (2013).

W. Xu, D. Curreli, D. Andruczyk, T. Mui, R. Switts and D.N. Ruzic, “Heat transfer of TEMHD driven lithium flow in stainless steel trenches”, Journal of Nuclear Materials (2013).

P. Raman, A. Groll, P. Fiflis, D. Curreli, D. Andruczyk and D. N. Ruzic, “Chemical Sputtering Studies of Lithiated ATJ graphite”, Journal of Nuclear Materials (2013).

2012

C. H. Castano, M. Aghazarian, J. B. O. Caughman, II, and D. N. Ruzic, “Visual and electrical evidence supporting a two-plasma mechanism of vacuum breakdown initiation”, IEEE Transactions on Plasma Science, Vol. 40, No. 4, April 2012.

A. Dulkin, Ko, L. Wu, I. Karim, K. Leeser, and K. J. Park, L. Meng and D. N. Ruzic, “Improving the quality of barrier/seed interface by optimizing physical vapor deposition of Cu Film in hollow cathode magnetron”, J. Vac. Sci. Technol. A, 29, 041514 (2011).

S. Jung, D. Andruczyk, and D. N. Ruzic, “Laboratory investigation of vapor shielding for Lithium-coated Molybdenum in Devex”, IEEE Transaction on Plasma Science, Vol. 40, No. 3, March 2012.

Z. Ouyang, T-S Cho, and D. N. Ruzic, “Deposition of YSZ thin films by atmospheric plasma-assisted pulsed laser ablation”, IEEE Transaction on Plasma Science, Vol. 40, No. 11, November 2012.

J. Sporre and D. N. Ruzic, “Debris transport analysis at the intermediate focus of an extreme ultraviolet light source”, Journal of Micro/Nanolith. MEMS MOEMS 11(2), 021117 (Apr–Jun 2012).

Y. Wu, J. Hong, Z. Ouyang, T-S. Cho, and D. N. Ruzic, “Electrical and optical characteristics of cylindrical non-thermal atmospheric-pressure dielectric barrier discharge plasma sources”, Surface and Coatings Technology, 2012.

2011

A. Dulkin, E. Ko, L. Wu, I. Karim, K. Leeser, K. J. Park, L. Meng, and D. N. Ruzic, “Improving the quality of barrier/seed interface by optimizing physical vapor deposition of Cu film on hollow cathode magnetron,” J. Vac. Sci. Technol. A 29(4), 041514 (2011).

D. N. Ruzic and V. Surla, “High-energy density beams and plasmas for micro- and nano-texturing of surfaces by rapid melting and solidification”, J. Phys. D: Appl. Phys. 44, 174026, (2011).

V. Surla, P. Raman, D. Burns, M.J. Neumann, D.N. Ruzic, “Physical and chemical erosion studies of lithiated ATJ graphite,” Journal of Nuclear Materials (2011).

D. N. Ruzic, W. Xu, D. Andruczyk and M. A Jaworski, “Lithium-Metal Infused Trenches (LiMIT) for Heat Removal in Fusion Devices”, Nuc. Fusion52 (2011) 102002 (4pp)

V. Surla, M. Tung, W. Xu, D. Andruczyk, M. Neumann, D. N. Ruzic and D. Mansfield, “Seebeck Coefficient Measurements of Lithium Isotopes“, J. Nuc. Matter 415 (2011) 18-22.

S. Jung, V, Surla, T, K. Gray, D. Andruczyk and D. N. Ruzic, “Characterization of a Theta-Pinch Plasma Using Tripple Probe Diagnostics”, J. Nuc. Matter, Published on line, xxx (2011) xxx-xxx.

Z. Ouyang, L. Meng, P. Raman, T. S. Cho and D. N. Ruzic, “Laser-assisted plasma coating atatmospheric pressure: production ofyttria-stabilized zirconia thermal barriers“, J. Phys. D: Appl. Phys. 44 (2011) 265202

L. Meng, A. N. Cloud, S. Jung and D. N. Ruzic, “Study of Plasma Dynamics in a Modulated Pulsed Power Magnetron Discharge Using a Time-Resolved Langmuir Probe“, Journal of Vacuum Science & Technology A 29(1), Jan/Feb 2011.

2010

C. Y. Hwang, S. Jung, Y. S. Hwang and B. C. Cho, “Lethal Effects of Pulsed High-Voltage Discharge on Marine Plankton and Escherichia coli“, Water Air & Soil Pollution (2010) 213:161–16

L. Wu, E. Ko, A. Dulkin, K. J. Park, S. Fields, K. Leeser, L. Meng and D. N. Ruzic, “ Flux and energy analysis of species in hollow cathode magnetron ionized physical vapor deposition of copper “, Review of Scientific Instruments 81, 123502 (2010)

L. Meng, R. Raju, R. Flauta, H. Shin, D.N. Ruzic and D. B. Hayden “In situ Plasma Diagnostics Study of a Commercial High-Power Hollow Cathode Magnetron Deposition Tool”, Journal of Vacuum Science and Technology A, 28, 112, (2010).

M. A. Jaworski, T. K. Gray, M. Antonelli, J. J. Kim, C.Y. Lau, M. B. Lee, M. J. Neumann, W. Xu, and D. N. Ruzic, “Thermoelectric Magnetohydrodynamic Stirring of Liquid Metals” Physics Review Letters, 104, 094503 (2010).

V. Surla, M. A. Jaworski, T. K. Gray, K. Ibano, W. Xu, M. J. Neumann, and D. N. Ruzic, “Lithium research as a Plasma Facing Cmponent Material at the University of Illinois” Thin Solid Films, Vol. 518, No. 22, pp. 6663-6666 (2010).

C. R. Struck, R. Flauta, M.J. Neumann, K.N. Kim, R. Raju, R. L. Bristol, D.N. Ruzic, “Grazing Incidence Broad Ion Beams for Reducing Line-Edge Roughness,” Journal of Micromechanics and Microengineering, Vol. 20, No. 7 (2010).

K. Ibano, D. Ruzic, and V. Surla, “Sputtering and thermal evaporation studies of lithiated ATJ graphite,” IEEE Transactions on Plasma Science, Vol. 38, No. 3 part 1, p 341-345 (2010).

D. N. Ruzic and A. J. Paul, “Guest editorial special issue on symposium on fusion engineering,” IEEE Transactions on Plasma Science, Vol. 38, No. 3 Part 1, p 222-223 (2010).

2009

M. Jarworski, N.B. Morley, and D. N. Ruzic, “Thermocapillary and Thermoelectric Effects in Liquid Lithium Plasma Facing Components”, Journal of Nuclear Materials, 390–391, pp. 1055-1058 (2009).

H. Shin, J. Sporre, R. Raju, D. N. Ruzic, “Reflectivity degradation of grazing-incident EUV mirrors by EUV exposure and carbon contamination”, Microelectronic Engineering, v 86, n 1, p 99-105 (2009).

H. Qiu, S. N. Srivastava, K. C. Thompson, M. J. Neumann, D. N. Ruzic “The Effectiveness of Mo-Au Gibbsian Segregating (GS) Alloys and The Surface Removal Effect on the GS Performance for EUV Collector Optics”, Optics Engineering, 48, 056501 (2009).

J. Sporre, C. H. Castano, R. Raju, and D. N. Ruzic, “Ionic Debris Measurement of Three Extreme Ultraviolet Sources,” Journal of Applied Physics, 106, 4 (2009).

M. Racic, K. Ibano, R. Raju and D. N. Ruzic, “Physical Erosion Studies of Plain and Lithiated Graphite”, Journal of Nuclear Materials, 390-391, pp. 1043-1047 (2009).

2008

H. Qiu, S. N. Srivastava, K. C. Thompson, M. J. Neumann, D. N. Ruzic “Temperature Dependence of Mo-Au Gibbsian Segregating Alloys”, Journal of Micro/Nanolithography Mems & Moems, 7, 033004 (2008).

M. A. Jaworski, C. Y. Laua, D. L. Urbansky, M. B. Malfa, T. K. Gray, M.J. Neumann, and D. N. Ruzic “Observations of liquid lithium uptake in a porous molybdenum foam” J. of Nuclear Materials. 378, pp. 105-109, May (2008).

H. Qiu, S. N. Srivastava, K. C. Thompson, M. J. Neumann, and D. N. Ruzic, “Time exposure performance of Mo-Au Gibbsian segregating alloys for extreme ultraviolet collector optics,” Appl. Opt. 47, 2443-2451 (2008).

H. Shin, S. N. Srivastava, D. N. Ruzic, “Tin removal from extreme ultraviolet collector optics by inductively coupled plasma reactive ion etching” J.Vac. Sci. Tech. May 2008, vol 26(3), pp. 389-398accepted 2008.

C. Castano, M. Aghazarian, D.N. Ruzic,“Preliminary evidence of field induced rhenium etching by XEF2 at high vacuum” J. Applied Physics,103, 044901-4, 2008.

O Morris, P Hayden, P Dunne, F O’Reilly, G O’Sullivan, E Sokell1, E L Antonsen, S N Srivastava, K C Thompson and D N Ruzic, “Determination of charge state, energy and angular distributions of tin ions emitted from laser produced plasma based EUV sources” J. of Physics, 2008.

2007

Neumann, M. J., DeFrees, R. A., Qiu, H., Ruzic, D. N., Khodykin, O., Ershov, A., and Bristol, R. L, “ Plasma cleaning of lithium off of collector optics material for use in extreme ultraviolet lithography applications”, Journal of Micro/nanolithography Mems & Moems, 6:2, 23005 (Apr.-Jun. 2007).

J.P Allain, M.D. Coventry, D.N. Ruzic, “Collisional and thermal effects on liquid lithium sputtering”, Phys. Rev. B, 76 (2007) 205434-1 to 12.

S. N. Srivastava, K.C. Thompson, E. L. Antonsen, H. Qiu, J.B Spencer, D. Papke, D. N. Ruzic, “Lifetime measurements on collector optics from Xe and Sn extreme ultraviolet sources”, J. of Applied Physics, 102, 023301, (2007).

D. N. Ruzic, K.C. Thompson, B.E. Jurczyk, E.L. Antonsen, S.N. Srivastava, J.B. Spencer, “Reduction of Ion Energies from a Multicomponent Z-Pinch Plasma”, IEEE Tran. On Plasma Sci. 35, 606-613 (2007) 606-613.

T.K. Gray, M.A. Jaworski, D.N. Ruzic, “Target heat loading due to fast, transient heat pulses produced from a conical theta-pinch as a prototype for benchmarking simulations of transient heat loads”, J. Nuc. Mater. 363-365 (2007) 1032-1036

D. A. Alman, H. Qiu, T. Spila, K. Thompson, E. Antonsen, B. Jurczyk, D. N. Ruzic, “Characterization of Collector Optic Material Samples Exposed to a DPP EUV Light Source”, J. Microlithography, Microfabrication, and Microsystems, 6(1), 2007.

2006

M. A. Jaworski, B. E. Jurczyk, Erik L. Antonsen, D. N. Ruzic, “Direct current magnetic insulation of an immersed RF antenna”, Plasma Source Science and Technology 15, 474-478 (2006).

Erik L. Antonsen, Keith C. Thompson, Matthew R. Hendricks, Darren A. Alman, Brian E. Jurczyk, D. N. Ruzic, “Ion Debris Characterization from a Z-Pinch Extreme Ultraviolet Light Source”, J. Appl. Phys., 99 063301 (2006).

Ning Li, P.W. Brenner, D.N. Ruzic, “An Integrated model for the Chemically Enhanced Physical Vapor Deposition (CEPVD) of tantalum nitride-based FILMS”, J. Vac. Sci. Technol., B, 24(3), (2006) 1071-1087.

Nieto, M., D.N. Ruzic, W. Olczak, R. Stubbers, “Measurement of Implanted Helium Particle Transport by a Flowing Liquid Lithium Film”, J. Nucl. Mater., 350 (2006) 101-112.

2005

Allain, J.P., D. N. Ruzic, M.D. Coventry, D. A. Alman, M.N. Nieto, “A Model for Ion-Bombardment Induced Erosion Enhancement with Target Temperature”, Nucl. Instrum. and Meth. B, 239 (2005) 347-355.

Brooks, J.N., J.P. Allain, R. Bastasz, R. Doerner, A. Hassanein, R. Kaita, S. Luckhardt, R. Maingi, R. Majeski, N. Morely, N. Narula, T. Rognlien, D. Rudakov, D. Ruzic, R, Stubbers, M. Ulrickson, C.P.C. Wong, A. Ying, “Overview of the ALPS Program”, Fusion Science Technology, 47 (2005) 669-678.

M.D. Coventry and D.N. Ruzic, “Incident-mass dependence of temperature-enhanced ion-induced sputtering in liquid metals”, Journal of Nuclear Materials 337-339 (2005) 1015-1018.

Qiu, Hua-Tan, D.N. Ruzic, “Molecular dynamics modeling of deuterium in liquid lithium surfaces”, Journal of Nuclear Materials 337-339 (2005) 1029-1032.

Stubbers, R., W. Olczak, M. Nieto, D. N. Ruzic, “Measurement of hydrogen absorption in flowing liquid lithium in the flowing lithium retention experiment (FLIRE)”, Journal of Nuclear Materials 337-339 (2005) 1033-1037.

Brooks, J.N., J.P. Allain, D.A. Alman and D.N. Ruzic, “Erosion, transport, and tritium codeposition issues of a beryllium wall tokamak”, Fusion Engineering and Design 72 (2005) 363-375.

Vargas-López, E., B E Jurczyk, M A Jaworski, M J Neumann, D N Ruzic, “Origins of debris and mitigation through a secondary RF plasma system for discharge-produced EUV sources”, Microelectronics Engineering 77 (2005) 95-102.

Jurczyk, B.E., E. Vargas-Lopez, M. N. Neumann, D. N. Ruzic, “Illinois Debris-mitigation EUV Applications Laboratory (IDEAL)”, Microelectronics Engineering 77 (2005) 103-109.

2004

Allain, J.P., M. Nieto, M.D. Coventry, R. Stubbers, D.N. Ruzic, “Studies of liquid-metal erosion and free surface flowing liquid lithium retention of helium at the University of Illinois”, Fusion Engineering and Design 72 (2004) 93-110.

Li, N., D.N. Ruzic, R.A. Powell, “Chemically Enhanced Physical Vapor Deposition (CEPVD) of TaN diffusion barrier layers for ULSI devices”, J. Vac. Sci. Technol. B 22(6), 2734-2742, Nov/Dec 2004.

Coventry, M.D., J.P. Allain, D.N. Ruzic, “Temperature Dependance of Liquid Sn Sputtering by low energy He and D bombardment”, Journal of Nuclear Materials 335, 115-120 (2004).

Alman, D.A, D.N. Ruzic, “Molecular Dynamics Simulation of Hydrocarbon Reflection and Dissociation Coefficients from Fusion-Relevant Carbon Surfaces”, Physica Scripta, T111, 145-151 (2004).

2003

Nieto M. Ruzic DN. Allain JP. Experimental measurements of helium retention in flowing liquid lithium. Fusion Science & Technology, 44:1, 232-236 (2003).

Alman, D.A., D.N. Ruzic, J.N. Brooks, “Molecular Dynamics Calculation of Carbon/Hydrocarbon Reflection Coefficients on a Graphite Surface Employing Distrubuted Computing”, J. Nucl. Mater. 313-316, 182-186 (2003).

Brooks, J.N., A. Kirschner, D.G. Whyte, D.N. Ruzic, D.A. Alman, “Advances in the Modeling of Chemical Erosion/Redeposition of Carbon Divertors and Application to the JET Tritium Codeposition Problem”, J. Nucl. Mater., 313-316 424-428 (2003).

M. Nieto, D. N. Ruzic, J.P. Allain, M.D. Coventry and E. Vargas-Lopez, “Helium Retention and Diffusivity in Flowing Liquid Lithium”, J. Nucl. Mater. 313-316, 646-650 (2003).

Allain, J.P., M.D. Coventry, D.N. Ruzic, “Temperature-Dependence of Liquid Lithium Sputtering”, J. Nucl. Mater. 313-316, 641-645 (2003).

Coventry, M.D., J.P. Allain, D.N. Ruzic, “D+, H+, and He+ Sputtering of Solid and Liquid Phase Tin”, J. Nucl. Mater., 313-316, 636-640 (2003).

2002

Allain, J.P., M. Nieto, M.D. Coventry, M.J. Neumann, E. Vargas-Lopes, D.N. Ruzic, “FLIRE—Flowing Liquid Surface Retention Experiment, Design and Testing”, Fusion Engineering and Design, 61-62, 245-250 (2002).

Allain, J.P., D.N. Ruzic. “Deuterium Treatment Effects on Lithium and Tin-Lithium Sputtering in Solid and Liquid Phase”, Hydrogen and Heilium Recycling at Plasma Facing Materials, Ed. Ahmed Hassanein. Netherlands: Kluwer Academic Publishers, 2002. pg. 73-82.